| 摘要 |
PROBLEM TO BE SOLVED: To improve the performance of an acoustic resonator.SOLUTION: An acoustic resonator structure includes: a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer and the second electrode, and including an outer edge substantially aligned with a boundary of the main membrane region; and a collar formed separately from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of the main membrane region or overlapping the main membrane region. |
