NEURAL SENSING DEVICE AND METHOD FOR MAKING THE SAME

摘要

The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion, a plurality of microprobes and at least one conductive via. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The through silicon via is disposed in the base and electrically connects the integrated circuit portion and the microprobes. Each of the microprobes includes an isolation layer partially covering a conductive layer.

主权项

1. A neural sensing device, comprising:
a base having an active surface and a backside surface; an integrated circuit portion disposed on the active surface of the base; and a plurality of microprobes disposed on the backside surface of the base, each of the microprobes comprising: a probe body protruding from the backside surface of the base and including a tip at a distal end; a first isolation layer covering the probe body; a conductive layer covering the first isolation layer and electrically connected to the integrated circuit portion; and a second isolation layer covering the conductive layer and having an opening to expose the conductive layer around a portion of the tip.