METHOD FOR CUTTING WAFER

摘要

A method for cutting wafers includes following steps. A silicon wafer is provided. A metal layer is formed on a top side of the silicon wafer. A bump layer is formed on the metal layer. A backside grinding tape is attached on the bump layer. A bottom side of the silicon wafer is half cut to form a cutting race. The bottom side of the silicon wafer is ground, so that a thickness of the silicon wafer is a predetermined thickness and only partial cutting race remains. The backside grinding tape is removed. A dicing tape is attached on the bottom side of the silicon wafer. The metal layer is cut by a laser. The metal layer is communicated with the cutting race. The manufacturing cost is reduced without crumbling or cracking. The chippings on the top or bottom side of the silicon wafer can be removed.

主权项

1. A method for cutting wafer comprising:
(a) providing a silicon wafer; (b) forming a metal layer on a top side of the silicon wafer; (c) forming a bump layer on the metal layer; (d) attaching a backside grinding tape on the bump layer;
(e) cutting a bottom side of the silicon wafer to form a first cutting race;(f) cutting a bottom side of the first cutting race by a second blade to form a second cutting race; (g) grinding the bottom side of the silicon wafer, so that a thickness of the silicon wafer is a predetermined thickness and only the second cutting race remains; (h) removing the backside grinding tape and attaching a dicing tape on the bottom side of the silicon wafer; and (i) cutting the metal layer by a laser, so that the metal layer is communicated with the second cutting race.