发明名称 SYSTEMS, METHODS, AND MEDIA FOR CREATING METALLIZATION FOR SOLAR CELLS
摘要 Systems, methods, and media for forming metallization for solar cells are provided. In some embodiments, a system for forming metallization on a substrate is provided, the system comprising: a first laser; a second laser; and a hardware processor programmed to: rotate a target at a predetermined speed; cause the first laser to emit a laser pulse that causes a material to be ablated from the rotating target toward a surface of a substrate; causing a continuous laser beam emitted by the second laser to pass through the ablated material and heat clusters in ablated material prior to the clusters landing on the surface of the substrate; and causing the continuous laser beam to heat deposited clusters from the plume of ablated material that have landed on the surface of the substrate to form a metallization line.
申请公布号 US2014272198(A1) 申请公布日期 2014.09.18
申请号 US201414216211 申请日期 2014.03.17
申请人 Bowden Stuart;Reginevich Mikhael;Herasimenka Stanislau 发明人 Bowden Stuart;Reginevich Mikhael;Herasimenka Stanislau
分类号 H01L31/18;C23C14/14;C23C14/54 主分类号 H01L31/18
代理机构 代理人
主权项 1. A system for forming metallization on a substrate, the system comprising: a first laser; a second laser; and at least one hardware processor programmed to: cause a rotating target to rotate at a predetermined speed;cause the first laser to emit a laser pulse that impinges the rotating target at a first location, wherein upon impinging the rotating target the laser pulse causes a plume of material to be ablated from the rotating target toward a surface of a substrate disposed below the rotating target, wherein a surface of the substrate is substantially parallel to the path of the laser pulse just prior to impinging the rotating target;causing a continuous laser beam emitted by the second laser to be aimed toward a first location on the surface of the substrate such that the continuous laser beam passes through the plume of ablated material and heats clusters in the plume of ablated material prior to the clusters landing on the surface of the substrate; andcausing the continuous laser beam emitted by the second laser to be aimed toward a second location on the surface of the substrate having deposited clusters from the plume of ablated material that have landed on the surface of the substrate such that the continuous laser beam further heats the deposited clusters together forming a metallization line on the surface of the substrate.
地址 Tempe AZ US