MEMS OSCILLATOR, MANUFACTURING METHOD FOR MEMS OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING BODY

摘要

PROBLEM TO BE SOLVED: To provide an MEMS oscillator in which shift in oscillation frequency and damage are hindered.SOLUTION: An MEMS oscillator 1 comprises: an insulation part 12; a first electrode 20 provided on one side of the insulation part 12; a fixed part 36; a function part 40; and a second electrode 30 provided such that at least part of it overlaps the first electrode 20 with a space left therefrom. The second electrode 30 abuts on the function part 40 and is extended from the fixed part 36.