| 摘要 |
The present invention is a confocal measurement device (100) for multipoint measurement of displacement of a measurement object (200) using a confocal optical system. The confocal measurement device (100) is provided with a light source (21), head units (10), a spectroscope (23), and image pickup elements (24). The confocal measurement device (100) emits light, in which axial chromatic aberration has been generated, onto the measurement object (200) using a plurality of heat units (10), allows light focused on the measurement object (200) to pass, and inputs the light that has passed through the plurality of heads (10) to a single spectroscope (23) using branched optical fibers and optical fibers (11). The confocal measurement device (100) furthermore receives the spectroscopically separated light in the image pickup elements (24) arrayed in a single dimension in the spectroscopic direction by the spectroscopic unit, and determines the peak wavelength that corresponds to each of the plurality of head units (10) from the light received by the image pickup elements (24) using the control circuit unit (25). |
