发明名称 Adhesion between Post-Passivation Interconnect Structure and Polymer
摘要 An embodiment integrated circuit structure includes a substrate, a metal pad over the substrate, a post-passivation interconnect (PPI) structure over the substrate and electronically connected to the metal pad, a thin oxide film layer directly over a top surface of the PPI structure, and a polymer layer over the thin oxide film layer and PPI structure.
申请公布号 US2014264853(A1) 申请公布日期 2014.09.18
申请号 US201313800653 申请日期 2013.03.13
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 Lin Jing-Cheng;Hung Jui-Pin;Lin Min-Chen;Lin Yi-Hang
分类号 H01L23/00 主分类号 H01L23/00
代理机构 代理人
主权项 1. An integrated circuit structure comprising: a substrate; a metal pad over the substrate; a post-passivation interconnect (PPI) structure over the substrate and electronically connected to the metal pad; a thin oxide film layer directly over a top surface of the PPI structure; and a polymer layer over the thin oxide film layer and PPI structure.
地址 Hsin-Chu TW
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