| 摘要 |
<p>Provided is an adhesive sheet which is able to realize excellent cutting precision and a reduction in cutting debris when cutting microcomponents such as electronic components. This adhesive sheet is provided only on one side with an adhesive surface in which the adhesive strength decreases when heated, with the elastic modulus of the surface on the opposite side of the adhesive surface measured by nanoindentation being at least 1 MPa. In a preferred embodiment, the sheet is provided with an adhesive region having the adhesive surface as one surface thereof and a coating region which abuts the side of the adhesive region opposite the adhesive surface in a cross-sectional view, with the adhesive region including an adhesive and thermally expandable microspheres.</p> |
