THERMAL DIFFUSION CHAMBER WITH CONVECTION COMPRESSOR

摘要

Preferably, a frame (104) supporting a containment chamber ( 102), with a sealed process chamber (168) confined within the containment chamber, and at least one fluid inlet structure (112) in fluidic communication with an exterior of the sealed process chamber, the fluid inlet structure including at least a flow adjustment structure (136) to control a fluid flow from a fluid source (912) around the exterior of the sealed process chamber; and an open loop fluid convection system (904) in fluidic communication with an interior of the sealed process chamber, wherein the fluid convection system includes a rotary compressor assembly (916) that extends into the sealed process chamber is disclosed.