发明名称 |
COMPOSITE END EFFECTORS |
摘要 |
An end effector includes a base, a plurality of fingers extending from the base, and a plurality of pads disposed on each of said fingers to support a substrate. The fingers comprise a carbon fiber material and taper from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base. A method includes adhering a plurality of pads along a plurality of tapered fingers, and adhering proximal ends of the plurality of tapered fingers with corresponding recesses of a base. The assembled pads, tapered fingers and base are placed on a fixture such that top surfaces of the plurality of pads rest on a top surface of the fixture and the assembly is held in place on the fixture until the adhesive has cured at room temperature. |
申请公布号 |
US2014265394(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201414200547 |
申请日期 |
2014.03.07 |
申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Pergande Paul E.;Forderhase Paul |
分类号 |
H01L21/677;B25J15/00 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
1. An end effector comprising:
a base; a plurality of fingers extending from said base, said fingers comprising a carbon fiber material, each of said fingers tapering from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base; and a plurality of pads disposed on each of said fingers to support at least one substrate. |
地址 |
Gloucester MA US |