发明名称 COMPOSITE END EFFECTORS
摘要 An end effector includes a base, a plurality of fingers extending from the base, and a plurality of pads disposed on each of said fingers to support a substrate. The fingers comprise a carbon fiber material and taper from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base. A method includes adhering a plurality of pads along a plurality of tapered fingers, and adhering proximal ends of the plurality of tapered fingers with corresponding recesses of a base. The assembled pads, tapered fingers and base are placed on a fixture such that top surfaces of the plurality of pads rest on a top surface of the fixture and the assembly is held in place on the fixture until the adhesive has cured at room temperature.
申请公布号 US2014265394(A1) 申请公布日期 2014.09.18
申请号 US201414200547 申请日期 2014.03.07
申请人 Varian Semiconductor Equipment Associates, Inc. 发明人 Pergande Paul E.;Forderhase Paul
分类号 H01L21/677;B25J15/00 主分类号 H01L21/677
代理机构 代理人
主权项 1. An end effector comprising: a base; a plurality of fingers extending from said base, said fingers comprising a carbon fiber material, each of said fingers tapering from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base; and a plurality of pads disposed on each of said fingers to support at least one substrate.
地址 Gloucester MA US