| 发明名称 |
Magnetic Field Sources For An Ion Source |
| 摘要 |
An ion source is provided that includes an ionization chamber and two magnetic field sources. The ionization chamber has a longitudinal axis extending therethrough and includes two opposing chamber walls, each chamber wall being parallel to the longitudinal axis. The two magnetic field sources each comprises (i) a core and (ii) a coil wound substantially around the core. Each magnetic field source is aligned with and adjacent to an external surface of respective one of the opposing chamber walls and oriented substantially parallel to the longitudinal axis. The cores of the magnetic field sources are physically separated and electrically isolated from each other. |
| 申请公布号 |
US2014265856(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201313835475 |
申请日期 |
2013.03.15 |
| 申请人 |
Nissin Ion Equipment Co., Ltd. |
发明人 |
Hahto Sami K.;Hamamoto Nariaki |
| 分类号 |
H01J27/02 |
主分类号 |
H01J27/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An ion source comprising:
an ionization chamber having a longitudinal axis extending therethrough and including two opposing chamber walls, each chamber wall being parallel to the longitudinal axis; and two magnetic field sources each comprising (i) a core and (ii) a coil wound substantially around the core, wherein each magnetic field source is aligned with and adjacent to an external surface of respective one of the opposing chamber walls and oriented substantially parallel to the longitudinal axis, and wherein the cores of the magnetic field sources are physically separated and electrically isolated from each other. |
| 地址 |
US |
