| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device that accurately condenses irradiation light if an objective lens moves to an optical axis direction. SOLUTION: An optical device 1 comprises: a wave front modulation section 6 that modulates the wave front of irradiation light L; an objective lens 13 that condenses the irradiation light L, the wave front of which is modulated by the wave front modulation section 6, on a sample A; an objective lens moving mechanism 20 that moves the objective lens 13 to an optical axis direction; relay optical systems 9 and 10 that relay the wave front modulated by the wave front modulation section 6 to the objective lens 13; and an optical path length adjustment section 12 that adjusts the optical path length between the objective lens 13 and the relay optical system 10 to compensate the changes in the optical path length due to the movement of the objective lens 13 caused by the objective lens moving mechanism 20. COPYRIGHT: (C)2012,JPO&INPIT |
