Cylindrical evaporation source

摘要

The source (1) has an outer cylinder wall including target material to be evaporated and two magnetic field sources (401, 402), which form a part of a magnet system (400). The magnetic field sources are provided at a carrier system (500) such that shape and strength of the magnetic field is set in accordance with a predefinable scheme in a spatial region. The carrier system sets the shape and strength of the field such that one of the magnetic field sources is arranged at a carrier arm (501) and pivoted by a predefinable pivot angle (alpha 1) with respect to a pivot axis (5011). The magnetic field sources are selected from a group consisting of a permanent magnet, ferrite magnet and an electromagnet. The magnet system forms a balanced magnetron or unbalanced magnetron.