A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
申请公布号
EP2122014(A4)
申请公布日期
2014.09.17
申请号
EP20080731042
申请日期
2008.02.28
申请人
ENTEGRIS, INC.
发明人
TIEBEN, ANTHONY, MATHIUS;HALBMAIER, DAVID, L.;KOLBOW, STEVEN, P.