PLASMA PROCESSING ROLL-TO-ROLL SYSTEM USING PLATE ELECTRODE WITH CAPILLARY

摘要

The present invention relates to a high density plasma generating apparatus and a plasma processing system and method for a substrate using the same. Provided is a plasma processing roll-to-roll system using a plate-shaped electrode with a capillary unit, the system comprising a susceptor including a cylindrical substrate heater having a dielectric substance formed on the outer circumferential surface; at least one plate-shaped electrode comprising a conductive body with multiple capillary units, arranged along the circumference of the substrate heater to be separated from the susceptor; and a pair of rolls rolling a flexible substrate by a roll-to-roll method to be separated from the plate-shaped electrode and in contact with the susceptor.