| 摘要 |
PROBLEM TO BE SOLVED: To generate a deposition of magnetic metal catalyst particles, with a uniform particle size and a uniform distribution, on a substrate with a high reproducibility. SOLUTION: A manufacturing method includes: a step of forming a base material that consists of an ampholytic non-magnetic metal on the substrate; a step of forming a magnetic metal, that reacts to a carbon-containing gas and is insoluble to alkaline, on the base material; a step of agglomerating the magnetic metal in the base material by a heat treatment to deposit the magnetic metal catalyst particles in the interface between the substrate and the base material at least; and a step of removing the base material by alkaline to expose the magnetic metal catalyst particles on the substrate. COPYRIGHT: (C)2011,JPO&INPIT |
