发明名称 DEVICE AND METHOD FOR MICROSTRUCTURED PLASMA TREATMENT
摘要 The invention relates to a device for the microstructured plasma treatment of a film substrate, especially of a plastic film. Said device comprises a rotatably received cylindrical electrode the surface of which contains or consists of metal, especially chromium, the surface having microstructured depressions, a planar high-voltage electrode the surface of which has a shape complementary to that of the cylindrical electrode and can be arranged on a section of the surface of the cylindrical electrode in a substantially form-fit manner, a transport device for transporting the film substrate to be treated between the surface of the cylindrical electrode and the high-voltage electrode, and a device for feeding a process gas to the surface of the cylindrical electrode and to the interspace between the cylindrical electrode and the high-voltage electrode.
申请公布号 EP2292080(B1) 申请公布日期 2014.09.17
申请号 EP20090761462 申请日期 2009.06.09
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 THOMAS, MICHAEL;KLAGES, CLAUS-PETER;DOHSE, ANTJE
分类号 H05H1/24 主分类号 H05H1/24
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