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发明名称
薄膜场效型电晶体
摘要
本发明之薄膜场效型电晶体之特征在于:于基板上至少包含闸极电极、闸极绝缘膜、活性层、电阻层、源极电极及汲极电极,上述源极电极及上述汲极电极经由设置于上述电阻层之接触孔而与上述活性层电性连接,并且上述活性层与上述电阻层之折射率之差为0.3以下,且上述电阻层之膜厚为5 nm以上且300 nm以下。
申请公布号
TW201436231
申请公布日期
2014.09.16
申请号
TW102148877
申请日期
2013.12.27
申请人
出光兴产股份有限公司
发明人
笘井重和;松崎滋夫;川岛绘美;但马望;海上晓
分类号
H01L29/78(2006.01);H01L21/28(2006.01)
主分类号
H01L29/78(2006.01)
代理机构
代理人
<name>陈长文</name>
主权项
地址
IDEMITSU KOSAN CO., LTD. 日本
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