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发明名称
基板处理装置、半导体装置之制造方法及基板处理装置的档板构造;SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND BAFFLE STRUCTURE OF THE SUBSTRATE PROCESSING APPARATUS
摘要
[课题]于知之产生电浆的基板处理装置中,不容易产生高密度之电浆,其结果会产生基板处理之生产率低的问题。[解决课题之手段]为了解决上述课题,提供一种基板处理装置,其具有:反应容器,系构成为筒状,于其外周设置线圈;盖部,其设于该反应容器之端部;气体导入口,其设于该盖部;第一板,其设于该气体导入口与该线圈之上端之间;第二板,其设于该第一板与该线圈之上端之间;基板处理室,其系于该反应容器内设在与该盖部不同之方向;及排气部,其与该基板处理室连接。
申请公布号
TW201436042
申请公布日期
2014.09.16
申请号
TW103119481
申请日期
2011.11.28
申请人
日立国际电气股份有限公司
发明人
野内英博;桧山真;角田彻;嶋田敏也;天野富天
分类号
H01L21/311(2006.01)
主分类号
H01L21/311(2006.01)
代理机构
代理人
<name>王彦评</name><name>赖碧宏</name>
主权项
地址
HITACHI KOKUSAI ELECTRIC INC. 日本
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