Micromachined gyroscope including a guided mass system

摘要

A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

主权项

1. A gyroscope comprising;
a substrate; a guided mass system, the guided mass system comprising at least one proof-mass and at least one guiding arm; wherein the at least one proof-mass and the at least one guiding arm are disposed in a plane parallel to the substrate; the at least one proof-mass being coupled to the at least one guiding arm; the at least one guiding arm being coupled to the substrate through at least one spring; wherein the proof-mass vibrates in a first direction and the guiding arm rotates in plane; wherein the at least one guiding arm and the at least one proof-mass are able to rotate out of the plane about a first sense axis in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction, the first sense axis being in the plane and parallel to the first direction; an actuator for vibrating the at least one proof-mass in the first direction; and a transducer for sensing motion of the at least one proof-mass normal to the plane.