Systems and methods for investigating a characteristic of a material using electron microscopy

摘要

Various embodiments of the present invention provide systems and methods for determining an characteristic of a material. The characteristics may include, but are not limited to, crystallographic and chemical composition characteristics of a material.

主权项

1. An characteristic investigation system for investigating an characteristic of a material, the system comprising:
an input device operable to designate at least one location on a sample and a time period; a beam operable to impinge on the at least one location on the sample for the time period; and a detector system operable to repeatedly sense signal data resultant from the interaction of the beam and the sample during the time period, and to generate a first image output corresponding to a first duration of exposure of the at least one location of the sample to the beam and a second image output corresponding to a second duration of exposure of the at least one location of the sample to the beam.