| 摘要 |
A liquid crystal substrate carrying robot and a controlling method thereof are provided to detect exact position of a glass substrate, and transfer the glass substrate after adjusting loading position. An elevating mechanism(1C,2C) consists of the link device(1A,2A). A horizontal multijoint tool consists of the link device. A hand part(9) is placed on the substrate(W) of the rectangular shape on the horizontal multijoint tool. A column(8) is equipped between the hand part and horizontal multijoint tool. A sensor(10) detects the location of substrate in column. |
