发明名称 ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS
摘要 <p>A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.</p>
申请公布号 KR20140109947(A) 申请公布日期 2014.09.16
申请号 KR20147019165 申请日期 2012.12.11
申请人 KLA-TENCOR CORPORATION 发明人 CHUANG YUNG HO ALEX;LIU XUEFENG;FIELDEN JOHN;BROWN DAVID L.
分类号 H01J31/50 主分类号 H01J31/50
代理机构 代理人
主权项
地址