| 摘要 |
A capacitive inertial sensor improving a sensing noise is disclosed. According to the present invention, the capacitive inertial sensor comprises: an inertia sensing part generating a first inertial capacitance and a second inertial capacitance increasing or decreasing complementarily to each other, and generating mass voltage based on a difference between the first inertial capacitance and the second inertial capacitance; a C-V converter generating the amplified mass voltage into amplification voltage; and a calculation part calculating a first level and a second level of the amplification voltage, and generating a check signal. During this time, a frequency of a first sensing signal and a second sensing signal is 2n (where n is a natural number) times as long as that of a reset signal. The capacitive inertial sensor in accordance to the present invention drastically improves the sensing noise caused by an offset voltage (Voff) effect, and as the result drastically enhances efficiency in sensing inertia application. |
