FLUID CONTROL DEVICE AND STRUCTURE FOR INSTALLING THERMAL SENSOR AT FLUID CONTROL DEVICE

摘要

Provided are: a fluid control device that effectively uses the space of a fluid control device and can install a thermal sensor for temperature management by means of a simple installation; and a structure for installing the thermal sensor at the fluid control device. The fluid control device (1) is provided with: a first fluid control apparatus (3) and second fluid control apparatus (4) that are adjacent to each other; and a thermal sensor (17) that measures the temperature of a fluid flowing within the first fluid control apparatus (3). The fluid control device (1) is further provided with a support member (19) that supports the thermal sensor (17) and is attached to the second fluid control apparatus (4).