| 摘要 |
In order to provide a thermal-type flow meter having high measurement precision, a thermal-type airflow meter is configured to comprise a flow rate detecting unit, an auxiliary channel in which the flow rate detecting unit is disposed, and an LSI into which a signal acquired from the flow rate detecting unit is input and that outputs the signal externally, and is configured so that a side wall of the auxiliary channel is disposed between the flow rate detecting unit and the LSI or on the LSI, and the longitudinal direction of the diffusion resistance provided in the LSI is parallel to the <100> oriented axis of an Si single crystal. |
