发明名称 |
COMPOUND SEMICONDUCTOR THIN FILM, PROCESS OF MANUFACTURING THE SAME, AND SOLAR CELL MODULE |
摘要 |
PROBLEM TO BE SOLVED: To provide a compound semiconductor thin film of high denseness.SOLUTION: The compound semiconductor thin film is manufactured by including steps of: forming a compound semiconductor thin film precursor by applying on a substrate an ink for forming a compound semiconductor thin film containing thiourea and a fine particle group containing amorphous fine particles; and crystallizing the amorphous fine particles by performing a heat treatment to the compound semiconductor thin film precursor in a processing gas atmosphere containing hydrogen. The compound semiconductor thin film has a surface roughness (Ra) of 200 nm or less. |
申请公布号 |
JP2014167998(A) |
申请公布日期 |
2014.09.11 |
申请号 |
JP20130039541 |
申请日期 |
2013.02.28 |
申请人 |
TOPPAN PRINTING CO LTD;TOKYO INSTITUTE OF TECHNOLOGY |
发明人 |
ZHANG YIWEN;YAMADA AKIRA |
分类号 |
H01L21/368;C01B19/00;H01L31/06 |
主分类号 |
H01L21/368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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