发明名称 COMPOUND SEMICONDUCTOR THIN FILM, PROCESS OF MANUFACTURING THE SAME, AND SOLAR CELL MODULE
摘要 PROBLEM TO BE SOLVED: To provide a compound semiconductor thin film of high denseness.SOLUTION: The compound semiconductor thin film is manufactured by including steps of: forming a compound semiconductor thin film precursor by applying on a substrate an ink for forming a compound semiconductor thin film containing thiourea and a fine particle group containing amorphous fine particles; and crystallizing the amorphous fine particles by performing a heat treatment to the compound semiconductor thin film precursor in a processing gas atmosphere containing hydrogen. The compound semiconductor thin film has a surface roughness (Ra) of 200 nm or less.
申请公布号 JP2014167998(A) 申请公布日期 2014.09.11
申请号 JP20130039541 申请日期 2013.02.28
申请人 TOPPAN PRINTING CO LTD;TOKYO INSTITUTE OF TECHNOLOGY 发明人 ZHANG YIWEN;YAMADA AKIRA
分类号 H01L21/368;C01B19/00;H01L31/06 主分类号 H01L21/368
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