INSPECTION APPARATUS AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for facilitating a device configuration for scanning an inspection object with pulse light.SOLUTION: An inspection apparatus 100 inspects an inspection object 9 which is a semiconductor device or a photo device. The inspection apparatus 100 includes: a stage 11 for holding the inspection object 9; a femtosecond laser 121 for emitting pulse light LP11; a galvanomirror 125 for irradiating the inspection object 9 with the pulse light LP11 obliquely, and scanning the inspection object 9 with the pulse light by changing an optical path of the pulse light LP11; and a detection unit 13 for detecting an electromagnetic wave LT1 emitted according to irradiation of the pulse light LP11 from the inspection object 9 in a non-coaxial manner with the pulse light LP11.