PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming apparatus and pattern forming method with which a defect rate of a printed convex-concave pattern can be reduced stably.SOLUTION: A pattern forming apparatus comprises: a first holder for holding a plate-like workpiece having a resin layer on a surface thereof; a metal mold having a fine convex-concave pattern; a second holder for holding the metal mold so that the metal mold faces to the resin layer of the workpiece; and a moving mechanism for moving the second holder in a direction where the second holder moves to make the workpiece and the metal mold relatively come close to/move away from each other. The convex-concave pattern of the metal mold is pressed on the resin layer so that the convex-concave pattern is printed. The moving mechanism includes: three or more moving rods which are to be connected to three or more prescribed points of the first or the second holder; a drive unit for moving the plurality of moving rods; and a control unit for controlling the drive unit. The plurality of prescribed points of the first or the second holder are positioned on a circumference surrounding the workpiece or the metal mold. The control unit controls the drive unit so that the plurality of moving rods is moved by a prescribed distance one by one in order in one circumferential direction.