| 摘要 |
The present invention relates to a cooling buffer device of a horizontal transfer type mask cleaning device which comprises: a horizontal transfer unit for horizontally transferring a cleaned and heat dried mask; a multi-stage buffer unit for loading the mask transferred by the horizontal transfer unit to move vertically; a vertical transfer unit for moving the multi-stage buffer unit up and down; and a side to side transfer unit for horizontally moving the horizontal transfer unit in a direction of getting away from the multi-stage buffer unit not to interfere the mask loaded on the multi-stage buffer unit when the multi-stage buffer unit moves downstream. According to the present invention, the mask is cooled in a state that the mask transferred horizontally after drying is moved in the vertical direction with respect to the transfer direction, thereby preventing an increase in an area of the horizontal transfer type mask cleaning device for cooling a mask. |
