Method and apparatus for monitoring electron beam condition of scanning electron microscope

摘要

A method and an apparatus for monitoring an electron beam condition of an SEM are provided. The SEM includes an electron gun and an electromagnetic lens system. The method includes acquiring quality parameters of an input electron beam, wherein the input electron beam is provided by the electron gun to the electromagnetic lens system, acquiring a current set of operation parameters of the electromagnetic lens system, calculating quality parameters of an output electron beam of the electromagnetic lens system, based on the quality parameters of the input electron beam and one or more operation parameters of the current set of operation parameters, and determining, based on the quality parameters of the output electron beam, whether calibration of the SEM is required.

主权项

1. A method for monitoring an electron beam condition of a scanning electron microscope (SEM), the SEM comprising an electron gun and an electromagnetic lens system, the method comprising:
acquiring quality parameters of an input electron beam, wherein the input electron beam is provided by the electron gun to the electromagnetic lens system; acquiring a current set of operation parameters of the electromagnetic lens system; calculating quality parameters of an output electron beam of the electromagnetic lens system, based on the quality parameters of the input electron beam and one or more operation parameters of the current set of operation parameters; and determining, based on the quality parameters of the output electron beam, whether calibration of the SEM is required.