MEMS switches and fabrication methods

摘要

MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections.

主权项

1. A microelectromechanical (MEMS) switch formed on a supporting layer having a top surface, the MEMS device comprising:
a stationary electrode including a conductive layer with a vertical orientation relative to the top surface of the supporting layer; at least one drive electrode; and a deflection electrode including a conductive layer with a vertical orientation relative to the top surface of the supporting layer, and the deflection electrode configured to be electrostatically attracted toward the at least one drive electrode, when the at least one drive electrode is electrically biased, with a cantilevered motion so that the conductive layer of the deflection electrode contacts the conductive layer of the stationary electrode.