Systems and methods for defect detection using exoelectrons

摘要

An defect detection system includes an exoemission sensor having a conductive layer and an insulating layer. The exoemission sensor is mountable to a material of interest and configured to receive exoemissions from the material while in an atmosphere. The exoemission sensor outputs a signal based upon the received emissions. An analysis device is configured to receive the signal from the exoemission sensor and determine whether a defect is present in the material based upon the signal.

主权项

1. A defect detection system comprising:
an exoemission sensor comprising a conductive layer and an insulating layer, the exoemission sensor mountable to a material of interest and configured to directly receive exoemissions from the material of interest, while in an atmosphere and electrically biased to the material of interest, and to output a signal based upon the received emissions; and an analysis device configured to receive the signal from the exoemission sensor and determine whether a defect is present in the material based upon the signal.