SPATIAL PRECISION MEASURING METHOD OF MACHINE TOOL AND SPATIAL PRECISION MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To measure a spatial accuracy of a machine tool with a simple configuration without using a tracking type laser interferometer.SOLUTION: A laser interferometer 10 is mounted on a tool machine 1 capable of changing an irradiation direction of laser beam, and a reflecting mirror 20 is moved on the tool machine according to a predetermined measurement program. The laser beam is irradiated toward the reflecting mirror 20 in the midst of a movement from the laser interferometer 10 so as to obtain distance information of the reflecting mirror 20 for the laser interferometer 10, while changing an irradiation direction of the laser beam of the laser interferometer 10 based on a measurement program 31, and the spatial accuracy of a tool machine 1 is measured based on the distance information obtained by the laser interferometer 10.