LASER WORKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser working device for irradiating a substrate with a laser beam of a generally homogeneous intensity without performing any complex control.SOLUTION: A laser working device 10 comprises a laser oscillator 2, a polygon mirror 5 and a shield plate 7. The laser oscillator 2 outputs a laser beam. The polygon mirror 5 is driven to reflect the laser beam from the laser oscillator 2 toward a glass substrate G and to scan the laser beam repeatedly over a predetermined length L1 along a parting-scheduled line. The shield plate 7 shields any of the laser beams reflected by the polygon mirror 5 that corresponds to both end portions of the predetermined length L1.