COATING METHOD AND COATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a coating method and a coating device capable of accurately applying coating liquid in short time on the entire surface of an area where film thickness accuracy is required.SOLUTION: A coating method has: a bead formation process in which control means accelerates discharge speed of coating liquid from a discharge port 13 and relative travel speed of a cap 11 and a substrate W to first discharge speed and first travel speed at which a bead by the coating liquid can be maintained between the cap 11 and the substrate W within time when the discharge port 13 is located at an upper part of an accuracy requirement exclusion area R1; and an acceleration process in which the control means accelerates the discharge speed to second discharge speed faster than the first discharge speed, and accelerates the relative travel speed to second travel speed faster than the first travel speed while maintaining an application amount of the coating liquid per unit area to the substrate W constant at acceleration smaller than acceleration of the discharge speed and the relative travel speed in the bead formation process and at which an error of film thickness of a coating film to be generated over a longitudinal direction of the discharge port 13 resulting from the acceleration of the discharge speed becomes within a range of film thickness accuracy to be required for the coating film after the bead formation process.