SUBSTRATE CONVEYANCE DEVICE AND SUBSTRATE CONVEYANCE TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To sufficiently prevent damage of a substrate W during conveyance while suppressing decline in cleanliness of a clean environment.SOLUTION: A lower belt guide 73 is installed at a position corresponding to an upper portion of a lower conveyance belt 51 of each lower support member 23, and a plurality of lower nozzle holes 81 for injecting air toward the upper portion of the lower conveyance belt 51 are formed so as to be opened on a lower support face 73f of each lower belt guide 73. An upper belt guide 83 is installed at a position corresponding to a lower portion of an upper conveyance belt 57 of each upper support member 25, and a plurality of upper nozzle holes 89 for injecting air toward the lower portion of the upper conveyance belt 57 are formed so as to be opened on an upper support face 83f of each upper belt guide 83.