发明名称 |
INTERNAL-PROCESSING LAYER FORMING METHOD, INTERNAL-PROCESSING LAYER FORMING MEMBER, AND, SURFACE THREE-DIMENSIONAL STRUCTURE MEMBER |
摘要 |
PROBLEM TO BE SOLVED: To provide an internal-processing layer forming method, an internal-processing layer forming member, and a surface three-dimensional structure member, which make it possible to acquire a workpiece of an intended surface shape without any trouble.SOLUTION: A condenser lens 72 for condensing a laser beam B is arranged in non-contact on an irradiated face 20t of a single crystal member 10. While a laser beam transmission distance from the condenser lens 72 to the irradiated face 20t is changed according to the irradiated position of the laser beam B on the irradiated face 20t, the laser beam B is focused inside of the single crystal member by the condenser lens 72, so that a layer of a three-dimensional structure dropped in a breaking strength is formed as a processing layer 21 inside of the single crystal member. |
申请公布号 |
JP2014161908(A) |
申请公布日期 |
2014.09.08 |
申请号 |
JP20130038229 |
申请日期 |
2013.02.28 |
申请人 |
SAITAMA UNIV;SHIN ETSU POLYMER CO LTD |
发明人 |
IKENO JUNICHI;SUZUKI HIDEKI |
分类号 |
B23K26/38;B23K26/064;B23K26/08;B23K26/40 |
主分类号 |
B23K26/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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