CLEANING DEVICE, CLEANING METHOD, AND PEELING SYSTEM

摘要

PROBLEM TO BE SOLVED: To prevent a cleaning fluid from adhering to a rear surface of a tape.SOLUTION: A cleaning device according to one embodiment includes: a frame holding part; a substrate holding part; a rotary mechanism; a liquid supply part; and a ring member. The frame holding part fixes a peripheral part of a tape to which a substrate is bonded. The substrate holding part suctions the substrate bonded to the tape through the tape to hold the substrate. The rotary mechanism integrally rotates the frame holding part and the substrate holding part. The liquid supply part supplies a cleaning fluid to a surface of the substrate. A tip part of the ring member comes close to or contacts with a rear surface of the frame. The ring member is disposed so as to enclose the tape.