发明名称 PROCEDE DE SEPARATION D'AU MOINS DEUX SUBSTRATS SELON UNE INTERFACE CHOISIE
摘要 A process for separating at least two substrates comprising at least two separation interfaces along one of the interfaces includes, before inserting a blade between the substrate, damaging at least one portion of a peripheral region of a chosen one of the interfaces, then inserting the blade and partially parting the substrates, and applying a fluid in a space between the parted substrates while the blade remains inserted therebetween, and decreasing a rupture energy of the chosen interface by stress corrosion involving breaking of siloxane bonds present at the interface.
申请公布号 FR2995447(B1) 申请公布日期 2014.09.05
申请号 FR20120058403 申请日期 2012.09.07
申请人 SOITEC 发明人 LANDRU DIDIER;FIGUET CHRISTOPHE
分类号 H01L21/67 主分类号 H01L21/67
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