| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for reducing a load on an automated material handling system during processing of materials.SOLUTION: A material processing tool with one or more load ports is equipped with at least one movable buffer attached to a front end of the tool. The buffer receives a materials pod from the automated material handling system at a preservation location, moves the materials pod to one or more load ports and/or receives the materials pod from one or more load ports, moves the materials pod to the preservation position, supports the materials pod from below and moves the materials pod by rotating the materials pod. Thus, time required for the material handling system to move the materials pod to and from the relevant location is reduced. Any materials pod in the buffer is accessible either manually or by the material handling system. |
