THIN FILM LAMINATED BODY, THIN FILM MAGNETIC SENSOR USING THE THIN FILM LAMINATED BODY AND METHOD FOR MANUFACTURING THE THIN FILM LAMINATED BODY

摘要

Relating to a thin film lamination and a thin film magnetic sensor using the thin film lamination and a method for manufacturing the thin film lamination that realizes a thin film conducting layer having high electron mobility and sheet resistance as an InAsSb operating layer. A thin film lamination is provided which is characterized by having an Al x In 1 - x Sb mixed crystal layer formed on a substrate, and an InAs x Sb 1 - x (0 < x ‰¤ 1) thin film conducting layer directly formed on the Al x In 1 - x Sb layer, in which the Al x In 1 - x Sb mixed crystal layer is a layer that exhibits higher resistance than the InAs x Sb 1 - x thin film conducting layer or exhibits insulation or p-type conductivity, and its band gap is greater than the InAs x Sb 1 - x thin film conducting layer, and the a lattice mismatch is+1.3% to -0.8%.