PROBE CARD AND APPARATUS FOR TESTING AN OBJECT INCLUDING THE SAME

摘要

A probe card includes a multilayer substrate, multiple needles and a temperature control unit. The multilayer substrate has a test pattern which a test current flows along. The needles are installed in the multilayer substrate to electrically connect the test pattern and an object and provide the test current to an object. The temperature control unit selectively provides high temperature and low temperature to the multilayer substrate. Therefore, high temperature or low temperature is quickly provided to the desired probe card, thereby greatly reducing a test temperature setting time. Consequently, the thermal deformation of the probe card and the object is reduced, thereby greatly improving test reliability.