发明名称 MICROCONTACT PRINTING PROCESS USING VACUUM PUMPING
摘要 <p>A microcontact printing method using vacuum exhausting of the present invention comprises a step for preparing a flexible stamp formed along a printing part where unselective printing pattern is formed and the edge of the printing part, including the peripheral part projected higher than the printing part; a step for placing the flexible stamp in order for the printing pattern to face a substrate and mounting the printing part to be separated from the substrate in order for the edge of the printing part to be in contact with the substrate; and a step for enabling the printing part to be in contact with on the surface of the substrate by discharging air inside the printing part from one side of the flexible stamp.</p>
申请公布号 KR20140106318(A) 申请公布日期 2014.09.03
申请号 KR20130020717 申请日期 2013.02.26
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 SUNG, HYUNG JIN;KANG, HYUN WOOK;LEEM, JU YOUNG;KO, SEUNG HWAN;YOON, SANG YOUL
分类号 H01L21/027 主分类号 H01L21/027
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