Detector for detecting particle radiation of an energy in the range of 150 eV to 300 keV, and a materials mapping apparatus with such a detector

摘要

Detector for detection of particle radiation, particularly particle radiation having an energy in the range of 150 eV to 300 keV, comprising at least one detector element, said detector element comprising a semiconductor detector material, at least a set of line-shaped electrodes conductively connected to at least one surface of said semiconductor detector material, each set comprising a plurality of line-shaped electrodes extending in parallel, and signal processor communicating with said line-shaped electrodes, wherein, in each set, said line-shaped electrodes are distributed with a strip pitch of less than 3 μm, and that the thickness of said semiconductor detector material is of less than two times the strip pitch of said line-shaped electrodes.

主权项

1. A detector for detecting particle radiation of an energy in the range of 150 eV to 300 keV, said detector having at least one detector element, which detector element comprises a semiconductor detector material in a detector area, at least one set of line-shaped electrodes, which electrodes extend in the detector area and are conductively connected to at least one surface of the semiconductor detector material, and signal processors communicating with said line-shaped electrodes, wherein the individual set of line-shaped electrodes comprises a plurality of line-shaped electrodes, which in the individual set are distributed with a strip pitch of at the most 3 μm, wherein the semiconductor detector material has a thickness (t) of at the most three times the strip pitch (s) of said line-shaped electrodes, and wherein the signal processors comprise signal collecting means and signal readout means, which signal readout means have a read out capability of at least 8,000 frames per second (8 kfps).