PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

摘要

According to the present invention, a blanket is absorbed and maintained by a lower stage (61) in the shape of a frame. The center of the blanket is locally supported by a plurality of hands (625) which can individually move upward. A transfer roller unit (64) is driven along a lower surface of the blanket so as to partially push up the blanket, thereby allowing the blanket to contact a plate or a substrate arranged above the blanket. Hands (625) move down in order according to movements of the transfer roller unit (64) and move away from the transfer roller unit (64). Consequently, the hands (625) are not interrupted by the transfer roller unit (64).