| 摘要 |
The present invention relates to an apparatus and a method for depositing an organic material. According to the present invention, in vacuum-depositing an organic material, such as an organic compound, an organic metal compound, and a polymer, which are an emission material for organic light-emitting devices (OLEDs), on a substrate, the thickness of the thin film at both ends of the substrate may be increased, and waste of the organic material may be prevented. The present invention uses the fact known from an experiment that in relation to the distribution of evaporated particles in the deposition process the evaporation shape of a spot evaporation source may be represented as the nth power of a cosine function and that as the exponent n increases, the deposition distribution is dense at the center and sparse at the edge. Nozzles with a large exponent n value are disposed at both ends of the linear evaporation source to have different jet characteristics. Accordingly, the uniformity and material efficiency are increased also at both ends of the substrate. |
