Generalized Virtual Inspector

摘要

Generalized virtual inspectors are provided. One system includes two or more actual systems configured to perform one or more processes on specimen(s) while the specimen(s) are disposed within the actual systems. The system also includes one or more virtual systems coupled to the actual systems to thereby receive output generated by the actual systems and to send information to the actual systems. The virtual system(s) are configured to perform one or more functions using at least some of the output received from the actual systems. The virtual system(s) are not capable of having the specimen(s) disposed therein.

主权项

1. A system configured to perform one or more actual processes and one or more virtual processes for a specimen, comprising:
two or more actual systems configured to perform one or more processes on one or more specimens while the one or more specimens are disposed within the two or more actual systems, wherein the one or more specimens comprise a wafer; and one or more virtual systems coupled to the two or more actual systems to thereby receive output generated by the two or more actual systems and to send information to the two or more actual systems, wherein the one or more virtual systems are configured to perform one or more functions using at least some of the output received from the two or more actual systems, and wherein the one or more virtual systems are not capable of having the one or more specimens disposed therein.