| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing fine silicon particles with a high yield. ! SOLUTION: A method for producing fine silicon particles comprises: a step A of heating a precursor obtained by drying a mixture comprising a silicon source and a carbon source under an inert atmosphere in a region, formed by a non-carbon material, by heating means; a step B of obtaining a mixed powder comprising fine silicon particles, fine silicon oxide particles, and fine silicon carbide particles by quickly cooling a produced gas produced by heating the precursor under the inert atmosphere in the region formed by the non-carbon material; a step C of etching the mixed powder by immersing it in an etching solution containing hydrofluoric acid; and a step D of performing centrifugal separation treatment of a produced solution obtained by immersing the mixed powder in the etching solution to extract the fine silicon carbide particles contained in the produced solution. ! COPYRIGHT: (C)2014,JPO&INPIT |
