发明名称 METAL-OXIDE SEMICONDUCTOR THIN FILM TRANSISTORS AND METHODS OF MANUFACTURING THE SAME
摘要 According to example embodiments a TFT includes: a substrate; a gate electrode on the substrate; a gate insulating layer on the gate electrode; a channel layer on the gate insulating layer, the channel layer including an indium-rich metal-oxide layer; a first electrode on one end of the channel layer; a second electrode on the other end of the channel layer; and a passivation layer on the channel layer between the first and second electrodes.
申请公布号 US2014239291(A1) 申请公布日期 2014.08.28
申请号 US201314062137 申请日期 2013.10.24
申请人 Samsung Electronics Co., Ltd. 发明人 SON Kyoung-seok;RYU Myung-kwan;JEONG Jae-Kyeong
分类号 H01L29/786;H01L29/24;H01L29/66 主分类号 H01L29/786
代理机构 代理人
主权项 1. A thin film transistor (TFT) comprising: a substrate; a gate electrode on the substrate; a gate insulating layer on the gate electrode; a channel layer on the gate insulating layer, the channel layer including an indium-rich metal-oxide layer; a first electrode on one end of the channel layer; a second electrode on an other end of the channel layer; and a passivation layer on the channel layer between the first and second electrodes.
地址 Suwon-Si KR